Inventor

HAYES ALAN V

US22 patents

⚠️ This page may combine multiple inventors who share the name “HAYES ALAN V”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HAYES ALAN V

VEECO INSTR INC

Charged particle source

Charged particle beam extraction and formation apparatus

Method for repetitive ion beam processing with a carbon containing ion beam

Charged particle source with liquid electrode

Charged particle source and operation thereof

Method and apparatus for controlling film profiles on topographic features

Electromagnetic field generator and method of operation

Ion sources and methods for generating an ion beam with a controllable ion current density distribution

Method and apparatus for surface processing of a substrate

Charged particle beam extraction and formation apparatus

Charged particle beam extraction and formation apparatus

Ion sources and methods for generating ion beams with controllable ion current density distributions over large treatment areas

Charged-particle source, control system and process using gating to extract the charged particle beam

Charged-particle source, control system, and process using gating to extract the ion beam

Charged particle beam extraction and formation apparatus

APPLIED MATERIALS INC

Plasma shaper to control ion flux distribution of plasma source

Ion extraction optics having non uniform grid assembly

Ion extraction assembly having variable electrode thickness for beam uniformity control

YEVTUKHOV RUSTAM

Ion sources and methods for generating an ion beam with controllable ion current density distribution

HAYES ALAN V

Methods of operating an electromagnet of an ion source

DRUZ BORIS

Method and apparatus for surface processing of a substrate using an energetic particle beam

ZENITH ELECTRONICS CORP

Power bridge rectifier assembly