Inventor
YEVTUKHOV RUSTAM
US10 patents
⚠️ This page may combine multiple inventors who share the name “YEVTUKHOV RUSTAM”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
VEECO INSTR INC
8 patentsUS6590324B1Jul 8, 2003
Charged particle beam extraction and formation apparatus
VEECO INSTR INC22 citations91
US7183716B2Feb 27, 2007
Charged particle source and operation thereof
VEECO INSTR INC46 citations88
US7557362B2Jul 7, 2009
Ion sources and methods for generating an ion beam with a controllable ion current density distribution
VEECO INSTR INC12 citations83
US7414355B2Aug 19, 2008
Charged particle beam extraction and formation apparatus
VEECO INSTR INC5 citations72
US6774550B2Aug 10, 2004
Charged particle beam extraction and formation apparatus
VEECO INSTR INC7 citations72
US10128083B2Nov 13, 2018
Ion sources and methods for generating ion beams with controllable ion current density distributions over large treatment areas
VEECO INSTR INC4 citations69
US10014164B2Jul 3, 2018
Ion beam materials processing system with grid short clearing system for gridded ion beam source
VEECO INSTR INC6 citations67
US7005782B2Feb 28, 2006
Charged particle beam extraction and formation apparatus
VEECO INSTR INC3 citations61