Inventor
FEENEY PAUL M
US14 patents
⚠️ This page may combine multiple inventors who share the name “FEENEY PAUL M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
7 patentsUS6495917B1Dec 17, 2002
Method and structure of column interconnect
IBM71 citations95
US6632377B1Oct 14, 2003
Chemical-mechanical planarization of metallurgy
IBM70 citations94
US6294105B1Sep 25, 2001
Chemical mechanical polishing slurry and method for polishing metal/oxide layers
IBM22 citations92
US6503827B1Jan 7, 2003
Method of reducing planarization defects
IBM42 citations91
US6426558B1Jul 30, 2002
Metallurgy for semiconductor devices
IBM28 citations91
US6355565B2Mar 12, 2002
Chemical-mechanical-polishing slurry and method for polishing metal/oxide layers
IBM5 citations73
US6007411ADec 28, 1999
Wafer carrier for chemical mechanical polishing
IBM13 citations73
CABOT MICROELECTRONICS CORP
6 patentsUS7998335B2Aug 16, 2011
Controlled electrochemical polishing method
CABOT MICROELECTRONICS CORP77 citations97
US6841479B2Jan 11, 2005
Method of reducing in-trench smearing during polishing
CABOT MICROELECTRONICS CORP24 citations92
US7585340B2Sep 8, 2009
Polishing composition containing polyether amine
CABOT MICROELECTRONICS CORP19 citations91
US6726534B1Apr 27, 2004
Preequilibrium polishing method and system
CABOT MICROELECTRONICS CORP39 citations89
US6350393B2Feb 26, 2002
Use of CsOH in a dielectric CMP slurry
CABOT MICROELECTRONICS CORP16 citations80
US7837888B2Nov 23, 2010
Composition and method for damascene CMP
CABOT MICROELECTRONICS CORP0 citations49