Inventor
SATOU YASUHIRO
JP7 patents
⚠️ This page may combine multiple inventors who share the name “SATOU YASUHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MITSUBISHI ELECTRIC CORP
3 patentsUS6480755B1Nov 12, 2002
Process control device and process control method permitting processing order and processing condition to be changed while manufacturing process continues
MITSUBISHI ELECTRIC CORP34 citations88
US6463348B1Oct 8, 2002
Process control device and process control method enabling restoration of lot control
MITSUBISHI ELECTRIC CORP5 citations58
US6397119B1May 28, 2002
Semiconductor manufacturing system for simultaneous processing of prescribed number of lots
MITSUBISHI ELECTRIC CORP3 citations58