Inventor
LO GLADYS SO-WAN
US3 patents
Patents
3 patentsUS6777173B2Aug 17, 2004
H2O vapor as a processing gas for crust, resist, and residue removal for post ion implant resist strip
LAM RES CORP18 citations80
US6554952B1Apr 29, 2003
Method and apparatus for etching a gold metal layer using a titanium hardmask
LAM RES CORP2 citations51
US6306312B1Oct 23, 2001
Method for etching a gold metal layer using a titanium hardmask
LAM RES CORP1 citations44