Inventor
JOHNSON BURGESS
US3 patents
Patents
3 patentsUS6684469B2Feb 3, 2004
Method for forming an actuator array device
HONEYWELL INT INC60 citations91
US6646364B1Nov 11, 2003
MEMS actuator with lower power consumption and lower cost simplified fabrication
HONEYWELL INT INC52 citations91
US7971483B2Jul 5, 2011
Systems and methods for acceleration and rotational determination from an out-of-plane MEMS device
HONEYWELL INT INC13 citations81