Inventor

LEE ERIC SEUNG

US3 patents

Patents

3 patents

US6420777B2Jul 16, 2002

Dual layer etch stop barrier

IBM17 citations90

US6680259B2Jan 20, 2004

Dual layer etch stop barrier

IBM6 citations71

US6548418B2Apr 15, 2003

Dual layer etch stop barrier

IBM10 citations71