Inventor

ORDEJON PABLO

ES3 patents

Patents

3 patents

US7311946B2Dec 25, 2007

Methods for depositing metal films on diffusion barrier layers by CVD or ALD processes

AIR PROD & CHEM13 citations81

US7524533B2Apr 28, 2009

Diffusion barrier layers and processes for depositing metal films thereupon by CVD or ALD processes

AIR PROD & CHEM6 citations71

US7985449B2Jul 26, 2011

Methods for depositing metal films onto diffusion barrier layers by CVD or ALD processes

AIR PROD & CHEM0 citations49