Inventor
LAMB III JAMES E
US17 patents
⚠️ This page may combine multiple inventors who share the name “LAMB III JAMES E”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
BREWER SCIENCE INC
15 patentsUS7026237B2Apr 11, 2006
Fill material for dual damascene processes
BREWER SCIENCE INC60 citations95
US6391472B1May 21, 2002
Fill material for dual damascene processes
BREWER SCIENCE INC45 citations95
US6716767B2Apr 6, 2004
Contact planarization materials that generate no volatile byproducts or residue during curing
BREWER SCIENCE INC101 citations93
US5281690AJan 25, 1994
Base-soluble polyimide release layers for use in microlithographic processing
BREWER SCIENCE INC62 citations93
US5110697AMay 5, 1992
Multifunctional photolithographic compositions
BREWER SCIENCE INC24 citations90
US7449230B2Nov 11, 2008
Lithography pattern shrink process and articles
BREWER SCIENCE INC9 citations83
US7455955B2Nov 25, 2008
Planarization method for multi-layer lithography processing
BREWER SCIENCE INC13 citations76
US7122296B2Oct 17, 2006
Lithography pattern shrink process and articles
BREWER SCIENCE INC8 citations73
US6670425B2Dec 30, 2003
Anti-reflective coating of polymer with epoxide rings reacted with light attenuating compound and unreacted epoxide rings
BREWER SCIENCE INC9 citations73
US6663916B2Dec 16, 2003
Anti-reflective coating of polymer with epoxide rings reacted with light attenuating compound and unreacted epoxide rings
BREWER SCIENCE INC5 citations73
US7790231B2Sep 7, 2010
Automated process and apparatus for planarization of topographical surfaces
BREWER SCIENCE INC7 citations72
US5368989ANov 29, 1994
Photolithographic article utilizing polymers with light-absorbing properties for anti-reflective coating
BREWER SCIENCE INC12 citations72
US9642258B2May 2, 2017
All-organic inductor-capacitor tank circuit for radio frequency sensor applications
BREWER SCIENCE INC2 citations68
US6893684B2May 17, 2005
Anti-reflective coating compositions for use with low k dielectric materials
BREWER SCIENCE INC3 citations62
US7998318B2Aug 16, 2011
Crosslinkable fill compositions for uniformly protecting via and contact holes
BREWER SCIENCE INC0 citations51