Inventor

KIM BOODEUK

KR2 patents

⚠️ This page may combine multiple inventors who share the name “KIM BOODEUK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KIM MYEONG KOO

1 patent

US9676892B2Jun 13, 2017

Polymers for hard masks, hard mask compositions including the same, and methods for forming a pattern of a semiconductor device using a hard mask composition

KIM MYEONG KOO7 citations73

SAMSUNG ELECTRONICS CO LTD

1 patent

US10890848B2Jan 12, 2021

Material for detecting photoresist and method of fabricating semiconductor device using the same

SAMSUNG ELECTRONICS CO LTD0 citations43