Inventor
Chun SeungJu
KR5 patents
Patents
5 patentsUS10529554B2Jan 7, 2020
Method for forming silicon nitride film selectively on sidewalls or flat surfaces of trenches
ASM IP HOLDING BV377 citations97
US11676812B2Jun 13, 2023
Method for forming silicon nitride film selectively on top/bottom portions
ASM IP HOLDING BV1 citations60
US11530483B2Dec 20, 2022
Substrate processing system
ASM IP HOLDING BV1 citations60
US10720322B2Jul 21, 2020
Method for forming silicon nitride film selectively on top surface
ASM IP HOLDING BV1 citations60
US12546000B2Feb 10, 2026
Substrate processing method
ASM IP HOLDING BV0 citations50