Inventor
KUROSAWA KOUICHI
JP13 patents
⚠️ This page may combine multiple inventors who share the name “KUROSAWA KOUICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI HIGH TECH CORP
6 patentsUS11133147B2Sep 28, 2021
Charged particle ray device and cross-sectional shape estimation program
HITACHI HIGH TECH CORP2 citations72
US7663390B2Feb 16, 2010
Inspection apparatus and method
HITACHI HIGH TECH CORP5 citations72
US10541103B2Jan 21, 2020
Charged particle beam device
HITACHI HIGH TECH CORP3 citations68
US8040146B2Oct 18, 2011
Inspection apparatus having a heating mechanism for performing sample temperature regulation
HITACHI HIGH TECH CORP2 citations61
US10964508B2Mar 30, 2021
Charged-particle beam device
HITACHI HIGH TECH CORP1 citations60
US11443914B2Sep 13, 2022
Charged-particle beam device and cross-sectional shape estimation program
HITACHI HIGH TECH CORP0 citations52