Inventor
DONKER RILPHO LUDOVICUS
NL6 patents
Patents
6 patentsUS9823572B2Nov 21, 2017
Lithographic method
ASML NETHERLANDS BV2 citations71
US10580545B2Mar 3, 2020
Beam delivery apparatus and method
ASML NETHERLANDS BV6 citations70
US11984236B2May 14, 2024
Radiation system
ASML NETHERLANDS BV0 citations60
US11140765B2Oct 5, 2021
Radiation source
ASML NETHERLANDS BV0 citations60
US10580546B2Mar 3, 2020
Radiation system
ASML NETHERLANDS BV1 citations60
US12174550B2Dec 24, 2024
Calibration system for an extreme ultraviolet light source
ASML NETHERLANDS BV1 citations56