Inventor
YAO CHIH-YUAN
TW6 patents
⚠️ This page may combine multiple inventors who share the name “YAO CHIH-YUAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
4 patentsUS10669625B2Jun 2, 2020
Pumping liner for chemical vapor deposition
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations71
US12443114B2Oct 14, 2025
Particle removal method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations57
US11852982B2Dec 26, 2023
Semiconductor manufacturing system
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations57
US11385555B2Jul 12, 2022
Semiconductor manufacturing system and particle removal method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations57