Inventor
KLEKOTKA JAMES E
US6 patents
⚠️ This page may combine multiple inventors who share the name “KLEKOTKA JAMES E”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
5 patentsUS6898558B2May 24, 2005
Method and apparatus for monitoring a material processing system
TOKYO ELECTRON LTD64 citations93
US7300730B1Nov 27, 2007
Creating an optically tunable anti-reflective coating
TOKYO ELECTRON LTD26 citations91
US7555395B2Jun 30, 2009
Methods and apparatus for using an optically tunable soft mask to create a profile library
TOKYO ELECTRON LTD5 citations61
US7437199B2Oct 14, 2008
Method for data pre-population
TOKYO ELECTRON LTD6 citations60
US6985787B2Jan 10, 2006
Method and apparatus for monitoring parts in a material processing system
TOKYO ELECTRON LTD6 citations60