Inventor
CHAYA HIROMI
JP5 patents
⚠️ This page may combine multiple inventors who share the name “CHAYA HIROMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
4 patentsUS7026832B2Apr 11, 2006
Probe mark reading device and probe mark reading method
TOKYO ELECTRON LTD120 citations96
US7477064B2Jan 13, 2009
Probing apparatus and positional deviation acquiring method
TOKYO ELECTRON LTD10 citations80
US7221177B2May 22, 2007
Probe apparatus with optical length-measuring unit and probe testing method
TOKYO ELECTRON LTD11 citations80
US7224175B2May 29, 2007
Probe mark reading device and probe mark reading method
TOKYO ELECTRON LTD6 citations72