Inventor
KOMATSU SHIGEKAZU
JP24 patents
⚠️ This page may combine multiple inventors who share the name “KOMATSU SHIGEKAZU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
18 patentsUS7026832B2Apr 11, 2006
Probe mark reading device and probe mark reading method
TOKYO ELECTRON LTD120 citations96
US7262613B2Aug 28, 2007
Inspection method and inspection apparatus for inspecting electrical characteristics of inspection object
TOKYO ELECTRON LTD16 citations92
US7301357B2Nov 27, 2007
Inspection method and inspection equipment
TOKYO ELECTRON LTD13 citations82
US7586317B2Sep 8, 2009
Inspection apparatus, probe card and inspection method
TOKYO ELECTRON LTD8 citations81
US7221177B2May 22, 2007
Probe apparatus with optical length-measuring unit and probe testing method
TOKYO ELECTRON LTD11 citations80
US7262618B2Aug 28, 2007
Inspection method and inspection apparatus for inspecting electrical characteristics of inspection object
TOKYO ELECTRON LTD8 citations73
US7135883B2Nov 14, 2006
Inspection method and inspection apparatus for inspecting electrical characteristics of inspection object
TOKYO ELECTRON LTD7 citations73
US9671459B2Jun 6, 2017
Maintenance carriage for wafer inspection apparatus and maintenance method for wafer inspection apparatus
TOKYO ELECTRON LTD2 citations72
US7224175B2May 29, 2007
Probe mark reading device and probe mark reading method
TOKYO ELECTRON LTD6 citations72
US12117485B2Oct 15, 2024
Wafer inspection system
TOKYO ELECTRON LTD0 citations61
US11762012B2Sep 19, 2023
Wafer inspection system
TOKYO ELECTRON LTD0 citations61
US11567123B2Jan 31, 2023
Wafer inspection system
TOKYO ELECTRON LTD0 citations61
US11061071B2Jul 13, 2021
Wafer inspection system, wafer inspection apparatus and prober
TOKYO ELECTRON LTD0 citations61
US10976364B2Apr 13, 2021
Test head and wafer inspection apparatus
TOKYO ELECTRON LTD0 citations61
US7701241B2Apr 20, 2010
Circuit for protecting DUT, method for protecting DUT, testing apparatus and testing method
TOKYO ELECTRON LTD3 citations60
US7692435B2Apr 6, 2010
Probe card and probe device for inspection of a semiconductor device
TOKYO ELECTRON LTD0 citations52
US7688088B2Mar 30, 2010
Inspection method and inspection apparatus for inspecting electrical characteristics of inspection object
TOKYO ELECTRON LTD1 citations52
US10753972B2Aug 25, 2020
Wafer inspection system, wafer inspection apparatus and prober
TOKYO ELECTRON LTD0 citations51
KOMATSU SHIGEKAZU
3 patentsUS8766658B2Jul 1, 2014
Probe
KOMATSU SHIGEKAZU2 citations60
US8159245B2Apr 17, 2012
Holding member for inspection, inspection device and inspecting method
KOMATSU SHIGEKAZU5 citations58
US8723544B2May 13, 2014
Structure of probe card for inspecting electrical characteristics of object to be inspected
KOMATSU SHIGEKAZU2 citations57