Inventor
SUH WEON-JOON
KR3 patents
Patents
3 patentsUS6933236B2Aug 23, 2005
Method for forming pattern using argon fluoride photolithography
HYNIX SEMICONDUCTOR INC10 citations71
US6703314B2Mar 9, 2004
Method for fabricating semiconductor device
HYNIX SEMICONDUCTOR INC3 citations61
US6709986B2Mar 23, 2004
Method for manufacturing semiconductor memory device by using photoresist pattern exposed with ArF laser beam
HYNIX SEMICONDUCTOR INC2 citations60