Inventor
ATHREYA SHANKARRAM A
US3 patents
Patents
3 patentsUS7067439B2Jun 27, 2006
ALD metal oxide deposition process using direct oxidation
APPLIED MATERIALS INC48 citations94
US7569501B2Aug 4, 2009
ALD metal oxide deposition process using direct oxidation
APPLIED MATERIALS INC17 citations91
US7569500B2Aug 4, 2009
ALD metal oxide deposition process using direct oxidation
APPLIED MATERIALS INC2 citations61