Inventor
OZAKI FUMITOSHI
JP3 patents
Patents
3 patentsUS6645873B2Nov 11, 2003
Method for manufacturing a semiconductor device
ASM JAPAN5 citations70
US7098129B2Aug 29, 2006
Interlayer insulation film used for multilayer interconnect of semiconductor integrated circuit and method of manufacturing the same
ASM JAPAN3 citations60
US6737357B2May 18, 2004
Method for manufacturing a semiconductor device
ASM JAPAN4 citations59