Inventor
ZHAI YOU
US5 patents
⚠️ This page may combine multiple inventors who share the name “ZHAI YOU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SHIM MOONSUB
2 patentsLAM RES CORP
2 patentsUS10351953B2Jul 16, 2019
Systems and methods for flow monitoring in a precursor vapor supply system of a substrate processing system
LAM RES CORP2 citations71
US11255017B2Feb 22, 2022
Systems and methods for flow monitoring in a precursor vapor supply system of a substrate processing system
LAM RES CORP0 citations60