Inventor
TERVO PAUL A
US42 patents
⚠️ This page may combine multiple inventors who share the name “TERVO PAUL A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CASCADE MICROTECH INC
40 patentsUS7009383B2Mar 7, 2006
Wafer probe station having environment control enclosure
CASCADE MICROTECH INC113 citations99
US6335628B2Jan 1, 2002
Wafer probe station for low-current measurements
CASCADE MICROTECH INC102 citations99
US6232788B1May 15, 2001
Wafer probe station for low-current measurements
CASCADE MICROTECH INC98 citations99
US5604444AFeb 18, 1997
Wafer probe station having environment control enclosure
CASCADE MICROTECH INC107 citations99
US5457398AOct 10, 1995
Wafer probe station having full guarding
CASCADE MICROTECH INC149 citations99
US5266889ANov 30, 1993
Wafer probe station with integrated environment control enclosure
CASCADE MICROTECH INC172 citations99
US5345170ASep 6, 1994
Wafer probe station having integrated guarding, Kelvin connection and shielding systems
CASCADE MICROTECH INC166 citations98
US6930498B2Aug 16, 2005
Membrane probing system
CASCADE MICROTECH INC68 citations97
US6720782B2Apr 13, 2004
Wafer probe station for low-current measurements
CASCADE MICROTECH INC53 citations97
US6492822B2Dec 10, 2002
Wafer probe station for low-current measurements
CASCADE MICROTECH INC64 citations97
US5663653ASep 2, 1997
Wafer probe station for low-current measurements
CASCADE MICROTECH INC91 citations97
US5532609AJul 2, 1996
Wafer probe station having environment control enclosure
CASCADE MICROTECH INC89 citations97
US7068057B2Jun 27, 2006
Low-current pogo probe card
CASCADE MICROTECH INC27 citations96
US6801047B2Oct 5, 2004
Wafer probe station having environment control enclosure
CASCADE MICROTECH INC51 citations96
US6642732B2Nov 4, 2003
Probe station thermal chuck with shielding for capacitive current
CASCADE MICROTECH INC52 citations96
US6636059B2Oct 21, 2003
Wafer probe station having environment control enclosure
CASCADE MICROTECH INC57 citations96
US6512391B2Jan 28, 2003
Probe station thermal chuck with shielding for capacitive current
CASCADE MICROTECH INC42 citations96
US6486687B2Nov 26, 2002
Wafer probe station having environment control enclosure
CASCADE MICROTECH INC59 citations96
US6445202B1Sep 3, 2002
Probe station thermal chuck with shielding for capacitive current
CASCADE MICROTECH INC56 citations96
US6380751B2Apr 30, 2002
Wafer probe station having environment control enclosure
CASCADE MICROTECH INC54 citations96
US6313649B2Nov 6, 2001
Wafer probe station having environment control enclosure
CASCADE MICROTECH INC71 citations96
US5434512AJul 18, 1995
Wafer probe station having integrated guarding, Kelvin connection and shielding systems
CASCADE MICROTECH INC73 citations96
US5237267AAug 17, 1993
Wafer probe station having auxiliary chucks
CASCADE MICROTECH INC60 citations96
US7595632B2Sep 29, 2009
Wafer probe station having environment control enclosure
CASCADE MICROTECH INC9 citations92
US7589518B2Sep 15, 2009
Wafer probe station having a skirting component
CASCADE MICROTECH INC10 citations92
US7492147B2Feb 17, 2009
Wafer probe station having a skirting component
CASCADE MICROTECH INC8 citations92
US7348787B2Mar 25, 2008
Wafer probe station having environment control enclosure
CASCADE MICROTECH INC11 citations92
US7330023B2Feb 12, 2008
Wafer probe station having a skirting component
CASCADE MICROTECH INC9 citations92
US7148711B2Dec 12, 2006
Membrane probing system
CASCADE MICROTECH INC25 citations92
US7138813B2Nov 21, 2006
Probe station thermal chuck with shielding for capacitive current
CASCADE MICROTECH INC24 citations92
US6838890B2Jan 4, 2005
Membrane probing system
CASCADE MICROTECH INC34 citations92
US7403025B2Jul 22, 2008
Membrane probing system
CASCADE MICROTECH INC12 citations83
US6856153B2Feb 15, 2005
Low-current pogo probe card
CASCADE MICROTECH INC11 citations82
US6559668B1May 6, 2003
Low-current pogo probe card
CASCADE MICROTECH INC11 citations82
US7616017B2Nov 10, 2009
Probe station thermal chuck with shielding for capacitive current
CASCADE MICROTECH INC5 citations74
US7292057B2Nov 6, 2007
Probe station thermal chuck with shielding for capacitive current
CASCADE MICROTECH INC9 citations74
US7148714B2Dec 12, 2006
POGO probe card for low current measurements
CASCADE MICROTECH INC7 citations74
US7042241B2May 9, 2006
Low-current pogo probe card
CASCADE MICROTECH INC4 citations74
US6822467B2Nov 23, 2004
Low-current pogo probe card
CASCADE MICROTECH INC6 citations74
US7323895B2Jan 29, 2008
Low-current pogo probe card
CASCADE MICROTECH INC0 citations52