Inventor
WILK DIETER
US4 patents
⚠️ This page may combine multiple inventors who share the name “WILK DIETER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR CORP
3 patentsUS9645093B2May 9, 2017
System and method for apodization in a semiconductor device inspection system
KLA TENCOR CORP3 citations69
US9176069B2Nov 3, 2015
System and method for apodization in a semiconductor device inspection system
KLA TENCOR CORP5 citations69
US10088345B1Oct 2, 2018
Haze and defect distribution and aperture configuration in surface metrology inspectors
KLA TENCOR CORP0 citations43