Inventor
BASELMANS JOHANNES JACOBUS MAT
NL34 patents
⚠️ This page may combine multiple inventors who share the name “BASELMANS JOHANNES JACOBUS MAT”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
33 patentsUS7352434B2Apr 1, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV178 citations98
US6650399B2Nov 18, 2003
Lithographic projection apparatus, a grating module, a sensor module, a method of measuring wave front aberrations
ASML NETHERLANDS BV172 citations97
US6809797B2Oct 26, 2004
Lithographic apparatus, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV71 citations94
US7196770B2Mar 27, 2007
Prewetting of substrate before immersion exposure
ASML NETHERLANDS BV18 citations93
US7403265B2Jul 22, 2008
Lithographic apparatus and device manufacturing method utilizing data filtering
ASML NETHERLANDS BV21 citations92
US7352435B2Apr 1, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV26 citations91
US7403264B2Jul 22, 2008
Lithographic projection apparatus and a device manufacturing method using such lithographic projection apparatus
ASML NETHERLANDS BV24 citations90
US7262831B2Aug 28, 2007
Lithographic projection apparatus and device manufacturing method using such lithographic projection apparatus
ASML NETHERLANDS BV38 citations90
US7148952B2Dec 12, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV24 citations89
US6887625B2May 3, 2005
Assist features for use in lithographic projection
ASML NETHERLANDS BV25 citations89
US6940587B2Sep 6, 2005
Lithographic apparatus and a measurement system
ASML NETHERLANDS BV17 citations84
US6777139B2Aug 17, 2004
Method of calibration of a lithographic apparatus, mask for use in calibration of lithographic apparatus, lithographic apparatus, device manufacturing method, device manufactured thereby
ASML NETHERLANDS BV15 citations84
US7239373B2Jul 3, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV10 citations83
US7230677B2Jun 12, 2007
Lithographic apparatus and device manufacturing method utilizing hexagonal image grids
ASML NETHERLANDS BV10 citations83
US7161654B2Jan 9, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV6 citations74
US7034917B2Apr 25, 2006
Lithographic apparatus, device manufacturing method and device manufactured thereby
ASML NETHERLANDS BV9 citations74
US7126672B2Oct 24, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV9 citations73
US7239370B2Jul 3, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV8 citations71
US7379159B2May 27, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV5 citations63
US7375796B2May 20, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations63
US7333175B2Feb 19, 2008
Method and system for aligning a first and second marker
ASML NETHERLANDS BV6 citations63
US7248334B2Jul 24, 2007
Sensor shield
ASML NETHERLANDS BV2 citations63
US7242475B2Jul 10, 2007
Method of determining aberration of a projection system of a lithographic apparatus
ASML NETHERLANDS BV6 citations63
US7187431B2Mar 6, 2007
Lithographic apparatus, method of determining properties thereof and computer program
ASML NETHERLANDS BV5 citations63
US7183566B2Feb 27, 2007
Lithographic apparatus for manufacturing a device
ASML NETHERLANDS BV3 citations63
US7180577B2Feb 20, 2007
Lithographic apparatus and device manufacturing method utilizing a microlens array at an image plane
ASML NETHERLANDS BV2 citations63
US7391503B2Jun 24, 2008
System and method for compensating for thermal expansion of lithography apparatus or substrate
ASML NETHERLANDS BV2 citations62
US7342644B2Mar 11, 2008
Methods and systems for lithographic beam generation
ASML NETHERLANDS BV4 citations62
US7332733B2Feb 19, 2008
System and method to correct for field curvature of multi lens array
ASML NETHERLANDS BV4 citations62
US7330239B2Feb 12, 2008
Lithographic apparatus and device manufacturing method utilizing a blazing portion of a contrast device
ASML NETHERLANDS BV3 citations62
US7079225B2Jul 18, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV4 citations62
US7304718B2Dec 4, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV1 citations52
US7068349B2Jun 27, 2006
Method of and preventing focal plane anomalies in the focal plane of a projection system
ASML NETHERLANDS BV2 citations49