Inventor
BOTMA HAKO
NL16 patents
⚠️ This page may combine multiple inventors who share the name “BOTMA HAKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
15 patentsUS7432517B2Oct 7, 2008
Pulse modifier, lithographic apparatus, and device manufacturing method
ASML NETHERLANDS BV43 citations89
US7148952B2Dec 12, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV24 citations89
US7030958B2Apr 18, 2006
Optical attenuator device, radiation system and lithographic apparatus therewith and device manufacturing method
ASML NETHERLANDS BV31 citations88
US7326948B2Feb 5, 2008
Beam modifying device, lithographic projection apparatus, method of treating a beam, and device manufacturing method
ASML NETHERLANDS BV7 citations73
US6924885B2Aug 2, 2005
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV10 citations73
US9785051B2Oct 10, 2017
Actuation mechanism, optical apparatus, lithography apparatus and method of manufacturing devices
ASML NETHERLANDS BV5 citations72
US8030628B2Oct 4, 2011
Pulse modifier, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV3 citations62
US7400381B2Jul 15, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations62
US7333178B2Feb 19, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV3 citations62
US7116400B2Oct 3, 2006
Illumination assembly, method for providing a radiation beam, lithographic projection apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations62
US7715101B2May 11, 2010
Electromagnetic radiation pulse duration control apparatus and method
ASML NETHERLANDS BV0 citations51
US7312850B2Dec 25, 2007
Lithographic apparatus, illumination system, and optical element for rotating an intensity distribution
ASML NETHERLANDS BV1 citations51
US7507976B2Mar 24, 2009
Lithographic apparatus, beam delivery systems, prisms and device manufacturing method
ASML NETHERLANDS BV1 citations49
US7375353B2May 20, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations39
US7130023B2Oct 31, 2006
Lithographic apparatus, mirror element, device manufacturing method, and beam delivery system
ASML NETHERLANDS BV0 citations39