Inventor
BONTEKOE MARCEL
NL4 patents
Patents
4 patentsUS7477772B2Jan 13, 2009
Lithographic apparatus and device manufacturing method utilizing 2D run length encoding for image data compression
ASML NETHERLANDS BV8 citations79
US7317510B2Jan 8, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV18 citations78
US12339594B2Jun 24, 2025
Substrate level sensing in a lithographic apparatus
ASML NETHERLANDS BV0 citations50
US10346729B2Jul 9, 2019
Apparatus and method for converting a vector-based representation of a desired device pattern for a lithography apparatus, apparatus and method for providing data to a programmable patterning device, a lithography apparatus and a device manufacturing method
ASML NETHERLANDS BV0 citations33