Inventor

ROGERS DATY M

US2 patents

Patents

2 patents

US6797633B2Sep 28, 2004

In-situ plasma ash/treatment after via etch of low-k films for poison-free dual damascene trench patterning

TEXAS INSTRUMENTS INC27 citations90

US6930028B1Aug 16, 2005

Antireflective structure and method

TEXAS INSTRUMENTS INC21 citations88