Inventor
CHEN YUNG-DAR
TW12 patents
Patents
12 patentsUS6159662ADec 12, 2000
Photoresist development method with reduced cycle time and improved performance
TAIWAN SEMICONDUCTOR MFG63 citations96
US5868278AFeb 9, 1999
Eliminating microbubbles in developer solutions to reduce photoresist residues
TAIWAN SEMICONDUCTOR MFG27 citations92
US5789117AAug 4, 1998
Transfer method for non-critical photoresist patterns
TAIWAN SEMICONDUCTOR MFG28 citations92
US6042976AMar 28, 2000
Method of calibrating WEE exposure tool
TAIWAN SEMICONDUCTOR MFG51 citations86
US6085430AJul 11, 2000
Apparatus and method for measuring eccentricity between two circular members
TAIWAN SEMICONDUCTOR MFG16 citations76
US7285147B2Oct 23, 2007
Air supply systems and pressure adjustment devices for use therewith
TAIWAN SEMICONDUCTOR MFG9 citations67
US6170165B1Jan 9, 2001
Method and apparatus for measuring a gap
TAIWAN SEMICONDUCTOR MFG7 citations65
US6273935B1Aug 14, 2001
Apparatus and method for trapping a toxic gas
TAIWAN SEMICONDUCTOR MFG5 citations60
US7025809B2Apr 11, 2006
Dual-type air purification system
TAIWAN SEMICONDUCTOR MFG5 citations59
US6863716B2Mar 8, 2005
Trap-type air purification system
TAIWAN SEMICONDUCTOR MFG4 citations59
US6702197B2Mar 9, 2004
Anti-electrostatic discharge spray gun apparatus and method
TAIWAN SEMICONDUCTOR MFG3 citations56
US7316240B2Jan 8, 2008
Exhaust system and mini-exhaust static pressure controlling apparatus thereof
TAIWAN SEMICONDUCTOR MFG0 citations46