Inventor
WEN MING-CHIEN
TW5 patents
Patents
5 patentsUS6206441B1Mar 27, 2001
Apparatus and method for transferring wafers by robot
TAIWAN SEMICONDUCTOR MFG69 citations88
US6113165ASep 5, 2000
Self-sensing wafer holder and method of using
TAIWAN SEMICONDUCTOR MFG84 citations88
US5792237AAug 11, 1998
Method and apparatus for eliminating trapped air from a liquid flow
TAIWAN SEMICONDUCTOR MFG23 citations86
US6775918B2Aug 17, 2004
Wafer cassette pod equipped with position sensing device
TAIWAN SEMICONDUCTOR MFG11 citations67
US7316240B2Jan 8, 2008
Exhaust system and mini-exhaust static pressure controlling apparatus thereof
TAIWAN SEMICONDUCTOR MFG0 citations46