Inventor
ALGOTS J MARTIN
US8 patents
⚠️ This page may combine multiple inventors who share the name “ALGOTS J MARTIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CYMER INC
5 patentsUS7372056B2May 13, 2008
LPP EUV plasma source material target delivery system
CYMER INC109 citations97
US7122816B2Oct 17, 2006
Method and apparatus for EUV light source target material handling
CYMER INC42 citations94
US7838854B2Nov 23, 2010
Method and apparatus for EUV plasma source target delivery
CYMER INC25 citations92
US7589337B2Sep 15, 2009
LPP EUV plasma source material target delivery system
CYMER INC23 citations92
US7366219B2Apr 29, 2008
Line narrowing module
CYMER INC20 citations90