Inventor
BERGSTEDT ROBERT A
US20 patents
⚠️ This page may combine multiple inventors who share the name “BERGSTEDT ROBERT A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CYMER INC
10 patentsUS7822092B2Oct 26, 2010
Laser system
CYMER INC37 citations93
US8000212B2Aug 16, 2011
Metrology for extreme ultraviolet light source
CYMER INC25 citations92
US7885309B2Feb 8, 2011
Laser system
CYMER INC37 citations92
US7366219B2Apr 29, 2008
Line narrowing module
CYMER INC20 citations90
US7999915B2Aug 16, 2011
Laser system
CYMER INC15 citations84
US7778302B2Aug 17, 2010
Laser system
CYMER INC15 citations84
US7653095B2Jan 26, 2010
Active bandwidth control for a laser
CYMER INC12 citations82
US7746913B2Jun 29, 2010
Laser system
CYMER INC7 citations74
US8379687B2Feb 19, 2013
Gas discharge laser line narrowing module
CYMER INC4 citations61
US7643528B2Jan 5, 2010
Immersion lithography laser light source with pulse stretcher
CYMER INC6 citations57
ASML NETHERLANDS BV
4 patentsUS9832853B2Nov 28, 2017
Alignment of light source focus
ASML NETHERLANDS BV7 citations84
US9239269B1Jan 19, 2016
Calibration of photoelectromagnetic sensor in a laser source
ASML NETHERLANDS BV6 citations69
US9239268B1Jan 19, 2016
Calibration of photoelectromagnetic sensor in a laser source
ASML NETHERLANDS BV2 citations58
US9374882B2Jun 21, 2016
Final focus assembly for extreme ultraviolet light source
ASML NETHERLANDS BV0 citations33