Inventor
RYLOV GERMAN E
US8 patents
⚠️ This page may combine multiple inventors who share the name “RYLOV GERMAN E”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CYMER INC
7 patentsUS7088758B2Aug 8, 2006
Relax gas discharge laser lithography light source
CYMER INC33 citations92
US6801560B2Oct 5, 2004
Line selected F2 two chamber laser system
CYMER INC18 citations92
US6798812B2Sep 28, 2004
Two chamber F2 laser system with F2 pressure based line selection
CYMER INC25 citations92
US7366219B2Apr 29, 2008
Line narrowing module
CYMER INC20 citations90
US7653095B2Jan 26, 2010
Active bandwidth control for a laser
CYMER INC12 citations82
US7058107B2Jun 6, 2006
Line selected F2 two chamber laser system
CYMER INC5 citations74
US7218661B2May 15, 2007
Line selected F2 two chamber laser system
CYMER INC4 citations62