Inventor

STRATE BRIAN

US3 patents

Patents

3 patents

US7366219B2Apr 29, 2008

Line narrowing module

CYMER INC20 citations90

US6661826B2Dec 9, 2003

Laser chamber insulator with sealed electrode feedthrough

CYMER INC11 citations70

US7653112B2Jan 26, 2010

Line narrowing module

CYMER INC3 citations60