Inventor
NYHUS PAUL
US9 patents
Patents
9 patentsUS7820550B2Oct 26, 2010
Negative tone double patterning method
INTEL CORP10 citations83
US7374865B2May 20, 2008
Methods to pattern contacts using chromeless phase shift masks
INTEL CORP9 citations82
US7056645B2Jun 6, 2006
Use of chromeless phase shift features to pattern large area line/space geometries
INTEL CORP12 citations82
US7179570B2Feb 20, 2007
Chromeless phase shift lithography (CPL) masks having features to pattern large area line/space geometries
INTEL CORP5 citations72
US11972979B2Apr 30, 2024
1D vertical edge blocking (VEB) via and plug
INTEL CORP0 citations60
US11721580B2Aug 8, 2023
1D vertical edge blocking (VEB) via and plug
INTEL CORP0 citations60
US7816061B2Oct 19, 2010
Lithography masks for improved line-end patterning
INTEL CORP5 citations60
US12131991B2Oct 29, 2024
Self aligned gratings for tight pitch interconnects and methods of fabrication
INTEL CORP0 citations58
US11251117B2Feb 15, 2022
Self aligned gratings for tight pitch interconnects and methods of fabrication
INTEL CORP0 citations58