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Inventor

RUSSELL MICHAEL W

US16 patents
⚠️ This page may combine multiple inventors who share the name “RUSSELL MICHAEL W”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ADVANCED TECH MATERIALS

10 patents
US6346741B1Feb 12, 2002

Compositions and structures for chemical mechanical polishing of FeRAM capacitors and method of fabricating FeRAM capacitors using same

ADVANCED TECH MATERIALS224 citations98
US6100200AAug 8, 2000

Sputtering process for the conformal deposition of a metallization or insulating layer

ADVANCED TECH MATERIALS133 citations97
US6184550B1Feb 6, 2001

Ternary nitride-carbide barrier layers

ADVANCED TECH MATERIALS54 citations96
US6316797B1Nov 13, 2001

Scalable lead zirconium titanate(PZT) thin film material and deposition method, and ferroelectric memory device structures comprising such thin film material

ADVANCED TECH MATERIALS67 citations95
US6984417B2Jan 10, 2006

Scalable lead zirconium titanate (PZT) thin film material and deposition method, and ferroelectric memory device structures comprising such thin film material

ADVANCED TECH MATERIALS15 citations92
US7344589B2Mar 18, 2008

Scalable lead zirconium titanate (PZT) thin film material and deposition method, and ferroelectric memory device structures comprising such thin film material

ADVANCED TECH MATERIALS9 citations83
US7012292B1Mar 14, 2006

Oxidative top electrode deposition process, and microelectronic device structure

ADVANCED TECH MATERIALS11 citations83
US6699402B2Mar 2, 2004

Chemical mechanical polishing compositions for CMP removal of iridium thin films

ADVANCED TECH MATERIALS14 citations81
US7862857B2Jan 4, 2011

Scalable lead zirconium titanate (PZT) thin film material and deposition method, and ferroelectric memory device structures comprising such thin film material

ADVANCED TECH MATERIALS3 citations73
US7705382B2Apr 27, 2010

Scalable lead zirconium titanate (PZT) thin film material and deposition method, and ferroelectric memory device structures comprising such thin film material

ADVANCED TECH MATERIALS6 citations73

UNIV NEW YORK STATE RES FOUND

3 patents

(unassigned)

1 patent

INTERSURFACE DYNAMICS INC

1 patent

UAB RESEARCH FOUNDATION

1 patent