Inventor
RUSSELL MICHAEL W
US16 patents
⚠️ This page may combine multiple inventors who share the name “RUSSELL MICHAEL W”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ADVANCED TECH MATERIALS
10 patentsUS6346741B1Feb 12, 2002
Compositions and structures for chemical mechanical polishing of FeRAM capacitors and method of fabricating FeRAM capacitors using same
ADVANCED TECH MATERIALS224 citations98
US6100200AAug 8, 2000
Sputtering process for the conformal deposition of a metallization or insulating layer
ADVANCED TECH MATERIALS133 citations97
US6184550B1Feb 6, 2001
Ternary nitride-carbide barrier layers
ADVANCED TECH MATERIALS54 citations96
US6316797B1Nov 13, 2001
Scalable lead zirconium titanate(PZT) thin film material and deposition method, and ferroelectric memory device structures comprising such thin film material
ADVANCED TECH MATERIALS67 citations95
US6984417B2Jan 10, 2006
Scalable lead zirconium titanate (PZT) thin film material and deposition method, and ferroelectric memory device structures comprising such thin film material
ADVANCED TECH MATERIALS15 citations92
US7344589B2Mar 18, 2008
Scalable lead zirconium titanate (PZT) thin film material and deposition method, and ferroelectric memory device structures comprising such thin film material
ADVANCED TECH MATERIALS9 citations83
US7012292B1Mar 14, 2006
Oxidative top electrode deposition process, and microelectronic device structure
ADVANCED TECH MATERIALS11 citations83
US6699402B2Mar 2, 2004
Chemical mechanical polishing compositions for CMP removal of iridium thin films
ADVANCED TECH MATERIALS14 citations81
US7862857B2Jan 4, 2011
Scalable lead zirconium titanate (PZT) thin film material and deposition method, and ferroelectric memory device structures comprising such thin film material
ADVANCED TECH MATERIALS3 citations73
US7705382B2Apr 27, 2010
Scalable lead zirconium titanate (PZT) thin film material and deposition method, and ferroelectric memory device structures comprising such thin film material
ADVANCED TECH MATERIALS6 citations73
UNIV NEW YORK STATE RES FOUND
3 patentsUS7776338B2Aug 17, 2010
Adjuvant activities of mutants of LT-IIa and LT-IIb enterotoxin lacking binding to ganglioside
UNIV NEW YORK STATE RES FOUND4 citations56
US7455843B2Nov 25, 2008
Adjuvant activities of mutants of LT-IIa and LT-IIb enterotoxin lacking binding to ganglioside
UNIV NEW YORK STATE RES FOUND2 citations56
US9827319B2Nov 28, 2017
Combined therapy and prophylaxis for genital tract infections
UNIV NEW YORK STATE RES FOUND0 citations39