Inventor
BOGUSH GREGORY H
US3 patents
Patents
3 patentsUS6726534B1Apr 27, 2004
Preequilibrium polishing method and system
CABOT MICROELECTRONICS CORP39 citations89
US6612911B2Sep 2, 2003
Alkali metal-containing polishing system and method
CABOT MICROELECTRONICS CORP11 citations71
US7677956B2Mar 16, 2010
Compositions and methods for dielectric CMP
CABOT MICROELECTRONICS CORP2 citations57