Inventor

LOGAN JOHN ROBERT

US2 patents

Patents

2 patents

US7545012B2Jun 9, 2009

Capacitive micromachined ultrasound transducer fabricated with epitaxial silicon membrane

GEN ELECTRIC77 citations96

US7037746B1May 2, 2006

Capacitive micromachined ultrasound transducer fabricated with epitaxial silicon membrane

GEN ELECTRIC92 citations96