Inventor
NEWTON KENNETH JOSEPH
US3 patents
Patents
3 patentsUS6723636B1Apr 20, 2004
Methods for forming multiple damascene layers
TEXAS INSTRUMENTS INC7 citations70
US7727885B2Jun 1, 2010
Reduction of punch-thru defects in damascene processing
TEXAS INSTRUMENTS INC1 citations46
US7087518B2Aug 8, 2006
Method of passivating and/or removing contaminants on a low-k dielectric/copper surface
TEXAS INSTRUMENTS INC0 citations46