Inventor
GLENN MAX
US3 patents
Patents
3 patentsUS8011247B2Sep 6, 2011
Multistage proof-mass movement deceleration within MEMS structures
HONEYWELL INT INC8 citations76
US7977786B2Jul 12, 2011
Saw debris reduction in MEMS devices
HONEYWELL INT INC2 citations56
US7800190B2Sep 21, 2010
Getter on die in an upper sense plate designed system
HONEYWELL INT INC0 citations39