P

Inventor

UMOTOY SAL

US5 patents
⚠️ This page may combine multiple inventors who share the name “UMOTOY SAL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

3 patents
US7520957B2Apr 21, 2009

Lid assembly for front end of line fabrication

APPLIED MATERIALS INC162 citations98
US7396480B2Jul 8, 2008

Method for front end of line fabrication

APPLIED MATERIALS INC285 citations98
US6494955B1Dec 17, 2002

Ceramic substrate support

APPLIED MATERIALS INC82 citations96

KAO CHIEN-TEH

1 patent
US8846163B2Sep 30, 2014

Method for removing oxides

KAO CHIEN-TEH190 citations98

APPPLIED MATERIALS INC

1 patent
US7767024B2Aug 3, 2010

Method for front end of line fabrication

APPPLIED MATERIALS INC28 citations91