P

Inventor

YUAN XIAOXIONG JOHN

US7 patents
⚠️ This page may combine multiple inventors who share the name “YUAN XIAOXIONG JOHN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

3 patents
US7520957B2Apr 21, 2009

Lid assembly for front end of line fabrication

APPLIED MATERIALS INC162 citations98
US7396480B2Jul 8, 2008

Method for front end of line fabrication

APPLIED MATERIALS INC285 citations98
US6375748B1Apr 23, 2002

Method and apparatus for preventing edge deposition

APPLIED MATERIALS INC293 citations96

KAO CHIEN-TEH

1 patent
US8846163B2Sep 30, 2014

Method for removing oxides

KAO CHIEN-TEH190 citations98

LAM HYMAN

1 patent
US8291857B2Oct 23, 2012

Apparatuses and methods for atomic layer deposition

LAM HYMAN375 citations96

APPPLIED MATERIALS INC

1 patent
US7767024B2Aug 3, 2010

Method for front end of line fabrication

APPPLIED MATERIALS INC28 citations91

KAO CHIEN TEH

1 patent
US10593539B2Mar 17, 2020

Support assembly

KAO CHIEN TEH5 citations83