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Inventor
KATOU HIROTAKA
JP
2 patents
⚠️ This page may combine multiple inventors who share the name “KATOU HIROTAKA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KOMATSU ELECTRONICS METALS CO
1 patent
US5953620A
Sep 14, 1999
Method for fabricating a bonded SOI wafer
KOMATSU ELECTRONICS METALS CO
23 citations
87
NASU YUICHI
1 patent
US8530801B2
Sep 10, 2013
Method and apparatus for manufacturing semiconductor wafer
NASU YUICHI
0 citations
28