Inventor
BEARDSLEY GARY J
US3 patents
Patents
3 patentsUS6135865AOct 24, 2000
CMP apparatus with built-in slurry distribution and removal
IBM27 citations89
US6299515B1Oct 9, 2001
CMP apparatus with built-in slurry distribution and removal
IBM10 citations70
US6387810B2May 14, 2002
Method for homogenizing device parameters through photoresist planarization
IBM11 citations68