Inventor
YANG YONG-HUNG
TW5 patents
⚠️ This page may combine multiple inventors who share the name “YANG YONG-HUNG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
3 patentsUS10864530B2Dec 15, 2020
Coating apparatus and method of forming coating film
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations69
US9573144B2Feb 21, 2017
Coating apparatus and method of forming coating film
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations69
US9324559B2Apr 26, 2016
Thin film deposition apparatus with multi chamber design and film deposition methods
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations48