Inventor
SMIRNOV ALEXEI V
US37 patents
⚠️ This page may combine multiple inventors who share the name “SMIRNOV ALEXEI V”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI METALS LTD
20 patentsUS9146563B2Sep 29, 2015
Mass flow controller and method for improved performance across fluid types
HITACHI METALS LTD8 citations84
US10126761B2Nov 13, 2018
Gas insensitive mass flow control systems and methods
HITACHI METALS LTD6 citations82
US7971480B2Jul 5, 2011
Mass flow controller having a first pair of thermal sensing elements opposing a second pair of thermal sensing elements
HITACHI METALS LTD10 citations82
US7971604B2Jul 5, 2011
Flow controller delivery of a specified-quantity of a fluid
HITACHI METALS LTD19 citations79
US11435764B1Sep 6, 2022
Mass flow controller utilizing nonlinearity component functions
HITACHI METALS LTD4 citations73
US11209298B2Dec 28, 2021
Thermal mass flow sensor with improved accuracy
HITACHI METALS LTD2 citations73
US10473500B2Nov 12, 2019
System and method for improved indicated flow in mass flow controllers
HITACHI METALS LTD3 citations73
US10533982B2Jan 14, 2020
Mass flow controller and method for controlling a mass flow rate of a gas in a gas stream
HITACHI METALS LTD2 citations72
US10295518B2May 21, 2019
System and method for detecting concentration of a gas in a gas stream
HITACHI METALS LTD2 citations72
US9605992B2Mar 28, 2017
On-tool mass flow controller diagnostic systems and methods
HITACHI METALS LTD2 citations71
US9488516B2Nov 8, 2016
On-tool mass flow controller diagnostic systems and methods
HITACHI METALS LTD3 citations71
US11327510B2May 10, 2022
Multi-chamber rate-of-change system for gas flow verification
HITACHI METALS LTD1 citations62
US11073845B2Jul 27, 2021
Parasitic flow correction method and apparatus
HITACHI METALS LTD0 citations62
US11041749B1Jun 22, 2021
Multi-gas mass flow controller and method
HITACHI METALS LTD1 citations62
US10982985B2Apr 20, 2021
High flow tubular bypass
HITACHI METALS LTD0 citations62
US9898013B2Feb 20, 2018
Mass flow controller for improved performance across fluid types
HITACHI METALS LTD0 citations52
US9846073B2Dec 19, 2017
On-tool mass flow controller diagnostic systems and methods
HITACHI METALS LTD0 citations51
US10534375B2Jan 14, 2020
Gas insensitive mass flow control systems and methods
HITACHI METALS LTD0 citations50
US10041825B2Aug 7, 2018
On-tool mass flow controller diagnostic systems and methods
HITACHI METALS LTD0 citations50
US9766635B2Sep 19, 2017
Mass flow controller with onboard diagnostics, prognostics, and data logging
HITACHI METALS LTD0 citations50
SMIRNOV ALEXEI V
10 patentsUS9027585B2May 12, 2015
Adaptive pressure insensitive mass flow controller and method for multi-gas applications
SMIRNOV ALEXEI V28 citations94
US8915262B2Dec 23, 2014
Mass flow controller algorithm with adaptive valve start position
SMIRNOV ALEXEI V17 citations84
US8196601B2Jun 12, 2012
Thermal flow sensor with zero drift compensation
SMIRNOV ALEXEI V7 citations84
US8131400B2Mar 6, 2012
Adaptive on-tool mass flow controller tuning
SMIRNOV ALEXEI V11 citations84
US8504311B2Aug 6, 2013
Method and mass flow controller for enhanced operating range
SMIRNOV ALEXEI V7 citations83
US9256228B2Feb 9, 2016
Mass flow controller with onboard diagnostics, prognostics, and data logging
SMIRNOV ALEXEI V9 citations81
US8321060B2Nov 27, 2012
Method and system of on-tool and on-site MFC optimization providing consistent response
SMIRNOV ALEXEI V9 citations76
US8195312B2Jun 5, 2012
Multi-mode control loop with improved performance for mass flow controller
SMIRNOV ALEXEI V2 citations55
US8160833B2Apr 17, 2012
Thermal mass flow sensor with improved response across fluid types
SMIRNOV ALEXEI V2 citations55
US8671973B2Mar 18, 2014
Mass flow controller hysteresis compensation system and method
SMIRNOV ALEXEI V0 citations41