Inventor
SUNG JUNG MO
KR6 patents
Patents
6 patentsUS10790122B2Sep 29, 2020
Plasma processing apparatus and method of manufacturing semiconductor device using the same
SAMSUNG ELECTRONICS CO LTD4 citations71
US10964578B2Mar 30, 2021
Apparatus for manufacturing semiconductor device and manufacturing method of semiconductor device
SAMSUNG ELECTRONICS CO LTD4 citations69
US11521866B2Dec 6, 2022
Plasma processing method, plasma processing apparatus and method of manufacturing semiconductor device using the apparatus
SAMSUNG ELECTRONICS CO LTD0 citations60
US11437222B2Sep 6, 2022
Plasma processing apparatus and method of manufacturing semiconductor device using the same
SAMSUNG ELECTRONICS CO LTD0 citations60
US11037806B2Jun 15, 2021
Plasma processing method, plasma processing apparatus and method of manufacturing semiconductor device using the apparatus
SAMSUNG ELECTRONICS CO LTD0 citations60
US11437264B2Sep 6, 2022
Apparatus for manufacturing semiconductor device and manufacturing method of semiconductor device
SAMSUNG ELECTRONICS CO LTD0 citations58