Inventor
MYUNG SEUL HA
KR3 patents
Patents
3 patentsUS10964578B2Mar 30, 2021
Apparatus for manufacturing semiconductor device and manufacturing method of semiconductor device
SAMSUNG ELECTRONICS CO LTD4 citations69
US11049754B2Jun 29, 2021
Method for controlling semiconductor process
SAMSUNG ELECTRONICS CO LTD0 citations60
US11437264B2Sep 6, 2022
Apparatus for manufacturing semiconductor device and manufacturing method of semiconductor device
SAMSUNG ELECTRONICS CO LTD0 citations58