Inventor
MCKEE TIINA
FI3 patents
Patents
3 patentsUS11047042B2Jun 29, 2021
Synthesis and use of precursors for ALD of molybdenum or tungsten containing thin films
ASM IP HOLDING BV12 citations84
US11624112B2Apr 11, 2023
Synthesis and use of precursors for ALD of molybdenum or tungsten containing thin films
ASM IP HOLDING BV1 citations71
US12365981B2Jul 22, 2025
Synthesis and use of precursors for ALD of molybdenum or tungsten containing thin films
ASM IP HOLDING BV0 citations60