Inventor

SCHARNWEBER RALF

DE10 patents

⚠️ This page may combine multiple inventors who share the name “SCHARNWEBER RALF”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ZEISS CARL SMT AG

3 patents

US7561253B2Jul 14, 2009

Method for a multiple exposure, microlithography projection exposure installation and a projection system

ZEISS CARL SMT AG5 citations71

US7880969B2Feb 1, 2011

Optical integrator for an illumination system of a microlithographic projection exposure apparatus

ZEISS CARL SMT AG4 citations60

US7875418B2Jan 25, 2011

Method for a multiple exposure, microlithography projection exposure installation and a projection system

ZEISS CARL SMT AG2 citations60

ZEISS CARL SMT GMBH

3 patents

US9217930B2Dec 22, 2015

Illumination system for a microlithographic projection exposure apparatus

ZEISS CARL SMT GMBH1 citations60

US9946161B2Apr 17, 2018

Optical system for a microlithographic projection exposure apparatus and microlithographic exposure method

ZEISS CARL SMT GMBH1 citations51

US9575414B2Feb 21, 2017

Illumination system for a microlithographic projection exposure apparatus

ZEISS CARL SMT GMBH0 citations50

FIOLKA DAMIAN

1 patent

US8587767B2Nov 19, 2013

Illumination optics for EUV microlithography and related system and apparatus

FIOLKA DAMIAN12 citations82

SCHARNWEBER RALF

1 patent

US8634060B2Jan 21, 2014

Method for a multiple exposure, microlithography projection exposure installation and a projection system

SCHARNWEBER RALF4 citations66

WANGLER JOHANNES

1 patent

US8395756B2Mar 12, 2013

Illumination system for a microlithographic projection exposure apparatus

WANGLER JOHANNES2 citations58

WOLF OLIVER

1 patent

US8520307B2Aug 27, 2013

Optical integrator for an illumination system of a microlithographic projection exposure apparatus

WOLF OLIVER4 citations54