Inventor
HUANG JENSHENG
US14 patents
⚠️ This page may combine multiple inventors who share the name “HUANG JENSHENG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SYNOPSYS INC
10 patentsUS7853919B2Dec 14, 2010
Modeling mask corner rounding effects using multiple mask layers
SYNOPSYS INC8 citations84
US7743357B2Jun 22, 2010
Method and apparatus for determining a process model that models the impact of CAR/PEB on the resist profile
SYNOPSYS INC6 citations73
US7454739B2Nov 18, 2008
Method and apparatus for determining an accurate photolithography process model
SYNOPSYS INC7 citations73
US8355807B2Jan 15, 2013
Method and apparatus for using aerial image sensitivity to model mask errors
SYNOPSYS INC5 citations71
US7934176B2Apr 26, 2011
Method and apparatus for determining a process model that models the impact of a CAR/PEB on the resist profile
SYNOPSYS INC4 citations62
US7707539B2Apr 27, 2010
Facilitating process model accuracy by modeling mask corner rounding effects
SYNOPSYS INC4 citations62
US7491479B2Feb 17, 2009
Compensating for effects of topography variation by using a variable intensity-threshold
SYNOPSYS INC2 citations62
US8812145B2Aug 19, 2014
Modeling mask errors using aerial image sensitivity
SYNOPSYS INC3 citations61
US10852635B2Dec 1, 2020
Compact modeling for the negative tone development processes
SYNOPSYS INC0 citations52
US7727687B2Jun 1, 2010
Method and apparatus for determining whether a sub-resolution assist feature will print
SYNOPSYS INC1 citations49
HUANG JENSHENG
3 patentsUS8631359B1Jan 14, 2014
System and technique for modeling resist profile change sensitivity at different heights
HUANG JENSHENG6 citations82
US8250498B2Aug 21, 2012
Method and apparatus for calibrating a photolithography process model by using a process window parameter
HUANG JENSHENG8 citations79
US8181128B2May 15, 2012
Method and apparatus for determining a photolithography process model which models the influence of topography variations
HUANG JENSHENG6 citations71